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Discovering deposition process regimes: leveraging unsupervised learning for process insights, surrogate modeling, and sensitivity analysis

Fuente: arXiv

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Bibliographic Details
Main Authors:	Suntaxi, Geremy Loachamín, Papavasileiou, Paris, Koronaki, Eleni D., Giovanis, Dimitrios G., Gakis, Georgios, Aviziotis, Ioannis G., Kathrein, Martin, Pozzetti, Gabriele, Czettl, Christoph, Bordas, Stéphane P. A., Boudouvis, Andreas G.
Format:	Preprint
Published:	2024
Subjects:	Chemical Physics Machine Learning Systems and Control Applications
Online Access:	Acceder al recurso
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