Investigation of Q degradation in low-loss Si3N4 from heterogeneous laser integration
Fuente:
arXiv
Enregistré dans:
| Auteurs principaux: | , , , , , , , |
|---|---|
| Format: | Preprint |
| Publié: |
2024
|
| Sujets: | |
| Accès en ligne: | |
| Tags: |
Ajouter un tag
Pas de tags, Soyez le premier à ajouter un tag!
|
| _version_ | 1866909223567228928 |
|---|---|
| author | Guo, Joel Xiang, Chao Jin, Warren Peters, Jonathan Li, Mingxiao Morin, Theodore Xia, Yu Bowers, John E. |
| author_facet | Guo, Joel Xiang, Chao Jin, Warren Peters, Jonathan Li, Mingxiao Morin, Theodore Xia, Yu Bowers, John E. |
| contents | High-performance, high-volume-manufacturing Si3N4 photonics requires extremely low waveguide losses augmented with heterogeneously integrated lasers for applications beyond traditional markets of high-capacity interconnects. State-of-the-art quality factors (Q) over 200 million at 1550 nm have been shown previously; however, maintaining high Qs throughout laser fabrication has not been shown. Here, Si3N4 resonator intrinsic Qs over 100 million are demonstrated on a fully integrated heterogeneous laser platform. Qi is measured throughout laser processing steps, showing degradation down to 50 million from dry etching, metal evaporation, and ion implant steps, and controllable recovery to over 100 million from annealing at 250C - 350C. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2406_09533 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | Investigation of Q degradation in low-loss Si3N4 from heterogeneous laser integration Guo, Joel Xiang, Chao Jin, Warren Peters, Jonathan Li, Mingxiao Morin, Theodore Xia, Yu Bowers, John E. Optics Applied Physics High-performance, high-volume-manufacturing Si3N4 photonics requires extremely low waveguide losses augmented with heterogeneously integrated lasers for applications beyond traditional markets of high-capacity interconnects. State-of-the-art quality factors (Q) over 200 million at 1550 nm have been shown previously; however, maintaining high Qs throughout laser fabrication has not been shown. Here, Si3N4 resonator intrinsic Qs over 100 million are demonstrated on a fully integrated heterogeneous laser platform. Qi is measured throughout laser processing steps, showing degradation down to 50 million from dry etching, metal evaporation, and ion implant steps, and controllable recovery to over 100 million from annealing at 250C - 350C. |
| title | Investigation of Q degradation in low-loss Si3N4 from heterogeneous laser integration |
| topic | Optics Applied Physics |
| url | https://arxiv.org/abs/2406.09533 |