Evaluating Metal-Organic Precursors for Focused Ion Beam Induced Deposition through Solid-Layer Decomposition Analysis

Fuente: arXiv

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Bibliographic Details
Main Authors:	Jany, Benedykt R., Madajska, Katarzyna, Butrymowicz-Kubiak, Aleksandra, Krok, Franciszek, Szymańska, Iwona B.
Format:	Preprint
Published:	2024
Subjects:	Mesoscale and Nanoscale Physics Materials Science
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2406.10022