Development of Volume Produced Negative Ion Source using a CCRF Discharge

Fuente: arXiv
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Bibliographic Details
Main Authors: Singh, Pawandeep, Dahiya, Swati, Pandey, Avnish, Patil, Yashashri, Karkari, Shantanu
Format: Preprint
Published: 2024
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author Singh, Pawandeep
Dahiya, Swati
Pandey, Avnish
Patil, Yashashri
Karkari, Shantanu
author_facet Singh, Pawandeep
Dahiya, Swati
Pandey, Avnish
Patil, Yashashri
Karkari, Shantanu
contents This work shows the development of a volume-produced negative ion source that consists of annular parallel plates driven by a 13.56 MHz capacitively coupled radio frequency in a push-pull configuration. This source shows advantages in controlling plasma conditions by varying the pressure, power, and applied axial magnetic field. It is found that the push-pull configuration allows the plasma potential to remain in the range of 20 to 40 Volts. Conversely, the application of a magnetic field helps serves to augment the production of negative ions in the central hollow part of the annular plate. Further, a plausible explanation to the obtained experimental results is presented.
format Preprint
id arxiv_https___arxiv_org_abs_2406_13506
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle Development of Volume Produced Negative Ion Source using a CCRF Discharge
Singh, Pawandeep
Dahiya, Swati
Pandey, Avnish
Patil, Yashashri
Karkari, Shantanu
Plasma Physics
This work shows the development of a volume-produced negative ion source that consists of annular parallel plates driven by a 13.56 MHz capacitively coupled radio frequency in a push-pull configuration. This source shows advantages in controlling plasma conditions by varying the pressure, power, and applied axial magnetic field. It is found that the push-pull configuration allows the plasma potential to remain in the range of 20 to 40 Volts. Conversely, the application of a magnetic field helps serves to augment the production of negative ions in the central hollow part of the annular plate. Further, a plausible explanation to the obtained experimental results is presented.
title Development of Volume Produced Negative Ion Source using a CCRF Discharge
topic Plasma Physics
url https://arxiv.org/abs/2406.13506