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Stress-Dependent Optical Extinction in LPCVD Silicon Nitride Measured by Nanomechanical Photothermal Sensing

Fuente: arXiv

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Bibliographic Details
Main Authors:	Kanellopulos, Kostas, West, Robert G., Emminger, Stefan, Martini, Paolo, Sauer, Markus, Foelske, Annette, Schmid, Silvan
Format:	Preprint
Published:	2024
Subjects:	Optics Mesoscale and Nanoscale Physics Materials Science Applied Physics
Online Access:	Acceder al recurso
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