Foundry compatible, efficient wafer-scale manufacturing of ultra-low loss, high-density Si$_3$N$_4$ photonic integrated circuits

Fuente: arXiv

Saved in:

Bibliographic Details
Main Authors:	Ji, Xinru, Wang, Rui Ning, Liu, Yang, Riemensberger, Johann, Qiu, Zheru, Kippenberg, Tobias J.
Format:	Preprint
Published:	2024
Subjects:	Optics Applied Physics
Online Access:	Acceder al recurso
Tags:	Add Tag No Tags, Be the first to tag this record!

Internet

https://arxiv.org/abs/2406.14296