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Foundry compatible, efficient wafer-scale manufacturing of ultra-low loss, high-density Si$_3$N$_4$ photonic integrated circuits

Fuente: arXiv

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Détails bibliographiques
Auteurs principaux:	Ji, Xinru, Wang, Rui Ning, Liu, Yang, Riemensberger, Johann, Qiu, Zheru, Kippenberg, Tobias J.
Format:	Preprint
Publié:	2024
Sujets:	Optics Applied Physics
Accès en ligne:	Acceder al recurso
Tags:	Ajouter un tag Pas de tags, Soyez le premier à ajouter un tag!

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