Transfer printing micro-assembly of silicon photonic crystal cavity arrays: beating the fabrication tolerance limit

Fuente: arXiv
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Bibliographic Details
Main Authors: Bommer, Sean P., Panuski, Christopher, Guilhabert, Benoit, Xia, Zhongyi, Smith, Jack A., Dawson, Martin D., Englund, Dirk, Strain, Michael J.
Format: Preprint
Published: 2024
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