Nonvolatile Silicon Photonic MEMS Switch Based on Centrally-Clamped Stepped Bistable Mechanical Beams
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arXiv
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| Main Authors: | Ma, Qian, Hu, Yinpeng, Lu, Ye, Liu, Yunzhi, Li, Huan, Dai, Daoxin |
|---|---|
| Format: | Preprint |
| Published: |
2024
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| Subjects: | |
| Online Access: | |
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