18 GHz Solidly Mounted Resonator in Scandium Aluminum Nitride on SiO2/Ta2O5 Bragg Reflector
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| Autores principales: | , , , , , , , , , , , , , , |
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| Formato: | Preprint |
| Publicado: |
2024
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| _version_ | 1866914979820601344 |
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| author | Barrera, Omar Ravi, Nishanth Saha, Kapil Dasgupta, Supratik Campbell, Joshua Kramer, Jack Kwon, Eugene Hsu, Tzu-Hsuan Cho, Sinwoo Anderson, Ian Simeoni, Pietro Hou, Jue Rinaldi, Matteo Goorsky, Mark S. Lu, Ruochen |
| author_facet | Barrera, Omar Ravi, Nishanth Saha, Kapil Dasgupta, Supratik Campbell, Joshua Kramer, Jack Kwon, Eugene Hsu, Tzu-Hsuan Cho, Sinwoo Anderson, Ian Simeoni, Pietro Hou, Jue Rinaldi, Matteo Goorsky, Mark S. Lu, Ruochen |
| contents | This work reports an acoustic solidly mounted resonator (SMR) at 18.64 GHz, among the highest operating frequencies reported. The device is built in scandium aluminum nitride (ScAlN) on top of silicon dioxide (SiO2) and tantalum pentoxide (Ta2O5) Bragg reflectors on silicon (Si) wafer. The stack is analyzed with X-ray reflectivity (XRR) and high-resolution X-ray diffraction (HRXRD). The resonator shows a coupling coefficient (k2) of 2.0%, high series quality factor (Qs) of 156, shunt quality factor (Qp) of 142, and maximum Bode quality factor (Qmax) of 210. The third-order harmonics at 59.64 GHz is also observed with k2 around 0.6% and Q around 40. Upon further development, the reported acoustic resonator platform can enable various front-end signal-processing functions, e.g., filters and oscillators, at future frequency range 3 (FR3) bands. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2407_02741 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | 18 GHz Solidly Mounted Resonator in Scandium Aluminum Nitride on SiO2/Ta2O5 Bragg Reflector Barrera, Omar Ravi, Nishanth Saha, Kapil Dasgupta, Supratik Campbell, Joshua Kramer, Jack Kwon, Eugene Hsu, Tzu-Hsuan Cho, Sinwoo Anderson, Ian Simeoni, Pietro Hou, Jue Rinaldi, Matteo Goorsky, Mark S. Lu, Ruochen Applied Physics This work reports an acoustic solidly mounted resonator (SMR) at 18.64 GHz, among the highest operating frequencies reported. The device is built in scandium aluminum nitride (ScAlN) on top of silicon dioxide (SiO2) and tantalum pentoxide (Ta2O5) Bragg reflectors on silicon (Si) wafer. The stack is analyzed with X-ray reflectivity (XRR) and high-resolution X-ray diffraction (HRXRD). The resonator shows a coupling coefficient (k2) of 2.0%, high series quality factor (Qs) of 156, shunt quality factor (Qp) of 142, and maximum Bode quality factor (Qmax) of 210. The third-order harmonics at 59.64 GHz is also observed with k2 around 0.6% and Q around 40. Upon further development, the reported acoustic resonator platform can enable various front-end signal-processing functions, e.g., filters and oscillators, at future frequency range 3 (FR3) bands. |
| title | 18 GHz Solidly Mounted Resonator in Scandium Aluminum Nitride on SiO2/Ta2O5 Bragg Reflector |
| topic | Applied Physics |
| url | https://arxiv.org/abs/2407.02741 |