Influence of buffer/protective layers on the structural and magnetic properties of SmCo films on Silicon
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arXiv
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| Autores principales: | , , , , , , |
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| Formato: | Preprint |
| Publicado: |
2024
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| _version_ | 1866916318826987520 |
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| author | Maspero, F. Koplak, O. V. Plaza, A. Heinz, B. Kohl, F. Pirro, P. Bertacco, R. |
| author_facet | Maspero, F. Koplak, O. V. Plaza, A. Heinz, B. Kohl, F. Pirro, P. Bertacco, R. |
| contents | Integration of Samarium Cobalt hard magnets on silicon requires buffer/protective layers that can enhance the magnetic properties of the magnet while preserving its structure and chemical composition after post-annealing treatments needed for the formation of the magnetically hard phase. In this work, a comparison of Samarium-Cobalt films for five different buffer/protective layers, namely Ti, W, TiW, Ta, Cr and two different annealing temperatures, 650°C and 750°C, is presented. Depending on materials and annealing temperatures, magnetic properties such as saturation and coercivity of the SmCo film can be finely tuned. We show that coercivity up to 3.65 T or saturation magnetization up to 0.95 T can be reached by proper choice of the relevant process parameters: deposition temperature, material for the buffer/protective layer and annealing temperature. Such value of coercivity is among the highest found in literature for thin films of SmCo. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2407_07716 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | Influence of buffer/protective layers on the structural and magnetic properties of SmCo films on Silicon Maspero, F. Koplak, O. V. Plaza, A. Heinz, B. Kohl, F. Pirro, P. Bertacco, R. Materials Science Integration of Samarium Cobalt hard magnets on silicon requires buffer/protective layers that can enhance the magnetic properties of the magnet while preserving its structure and chemical composition after post-annealing treatments needed for the formation of the magnetically hard phase. In this work, a comparison of Samarium-Cobalt films for five different buffer/protective layers, namely Ti, W, TiW, Ta, Cr and two different annealing temperatures, 650°C and 750°C, is presented. Depending on materials and annealing temperatures, magnetic properties such as saturation and coercivity of the SmCo film can be finely tuned. We show that coercivity up to 3.65 T or saturation magnetization up to 0.95 T can be reached by proper choice of the relevant process parameters: deposition temperature, material for the buffer/protective layer and annealing temperature. Such value of coercivity is among the highest found in literature for thin films of SmCo. |
| title | Influence of buffer/protective layers on the structural and magnetic properties of SmCo films on Silicon |
| topic | Materials Science |
| url | https://arxiv.org/abs/2407.07716 |