Fabrication of low-loss lithium niobate on insulator waveguides on the wafer scale
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arXiv
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| Main Authors: | , , , , , , , , , , |
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| Format: | Preprint |
| Published: |
2024
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| _version_ | 1866929418825367552 |
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| author | Younesi, Mohammadreza Kasebier, Thomas Elmanov, Ilia Li, Yang-Teng Kumar, Pawan Geiss, Reinhard Siefke, Thomas Eilenberger, Falk Setzpfandt, Frank Zeitner, Uwe Pertsch, Thomas |
| author_facet | Younesi, Mohammadreza Kasebier, Thomas Elmanov, Ilia Li, Yang-Teng Kumar, Pawan Geiss, Reinhard Siefke, Thomas Eilenberger, Falk Setzpfandt, Frank Zeitner, Uwe Pertsch, Thomas |
| contents | We report on the wafer scale fabrication of single mode low-loss lithium niobate on insulator waveguides utilizing a chemically amplified resist and an optimized dry etching method. The fabricated single mode waveguides are free of residuals and re-deposition, with measured losses for straight waveguides around 2 dB/m (0.02 dB/cm). We present on a method offering advantages for large-scale production due to its cost-effectiveness, faster writing time, and simplified processes. This work holds promise for advancing integrated photonics and optical communication technologies. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2407_09208 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | Fabrication of low-loss lithium niobate on insulator waveguides on the wafer scale Younesi, Mohammadreza Kasebier, Thomas Elmanov, Ilia Li, Yang-Teng Kumar, Pawan Geiss, Reinhard Siefke, Thomas Eilenberger, Falk Setzpfandt, Frank Zeitner, Uwe Pertsch, Thomas Optics Applied Physics We report on the wafer scale fabrication of single mode low-loss lithium niobate on insulator waveguides utilizing a chemically amplified resist and an optimized dry etching method. The fabricated single mode waveguides are free of residuals and re-deposition, with measured losses for straight waveguides around 2 dB/m (0.02 dB/cm). We present on a method offering advantages for large-scale production due to its cost-effectiveness, faster writing time, and simplified processes. This work holds promise for advancing integrated photonics and optical communication technologies. |
| title | Fabrication of low-loss lithium niobate on insulator waveguides on the wafer scale |
| topic | Optics Applied Physics |
| url | https://arxiv.org/abs/2407.09208 |