Tailoring 4H-SiC Surface Electronic States by Atomic-Layer Deposition for Ideal Peta-Ohm Resistors
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arXiv
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| Main Authors: | Xi, Yuying, Li, Helios Y., Li, Guohui, Su, Qingmei, Mao, Kaili, Xu, Bingshe, Hao, Yuying, Fang, Nicholas X., Cui, Yanxia |
|---|---|
| Format: | Preprint |
| Published: |
2024
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| Subjects: | |
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