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More-than-Moore Microacoustics: A Scalable Fabrication Process for Suspended Lamb Wave Resonators

Fuente: arXiv

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Dettagli Bibliografici
Autori principali:	Liffredo, Marco, Peretti, Federico, Xu, Nan, Stettler, Silvan, Villanueva, Luis Guillermo
Natura:	Preprint
Pubblicazione:	2024
Soggetti:	Systems and Control
Accesso online:	Acceder al recurso
Tags:	Aggiungi Tag Nessun Tag, puoi essere il primo ad aggiungerne!!

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