alpha-Ta Films on c-plane Sapphire with Enhanced Microstructure

Fuente: arXiv
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Auteurs principaux: Majer, Lena N., Smink, Sander, Braun, Wolfgang, Fenk, Bernhard, Harbola, Varun, Stuhlhofer, Benjamin, Wang, Hongguang, van Aken, Peter A., Mannhart, Jochen, Hensling, Felix V. E.
Format: Preprint
Publié: 2024
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author Majer, Lena N.
Smink, Sander
Braun, Wolfgang
Fenk, Bernhard
Harbola, Varun
Stuhlhofer, Benjamin
Wang, Hongguang
van Aken, Peter A.
Mannhart, Jochen
Hensling, Felix V. E.
author_facet Majer, Lena N.
Smink, Sander
Braun, Wolfgang
Fenk, Bernhard
Harbola, Varun
Stuhlhofer, Benjamin
Wang, Hongguang
van Aken, Peter A.
Mannhart, Jochen
Hensling, Felix V. E.
contents Superconducting films of alpha-Ta are promising candidates for the fabrication of advanced superconducting qubits. However, alpha-Ta films suffer from many growth-induced structural inadequacies that negatively affect their performance. We have therefore explored a new synthesis method for alpha-Ta films which allows the growth of these films with unprecedented quality. Using this method, high quality alpha-Ta films are deposited at a comparably high substrate temperature of 1150 C. They are single-phase alpha-Ta and have a single out-of-plane (110) orientation. They consist of grains above 2 um that have one of three possible in-plane orientations. As shown by scanning transmission electron microscopy and electron energy loss studies the substrate-film interfaces are sharp with no observable intermixing. The obtained insights into the epitaxial growth of body-centered-cubic films on quasi-hexagonal substrates lay the basis for harnessing the high structural coherence of such films in various applications.
format Preprint
id arxiv_https___arxiv_org_abs_2407_16227
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle alpha-Ta Films on c-plane Sapphire with Enhanced Microstructure
Majer, Lena N.
Smink, Sander
Braun, Wolfgang
Fenk, Bernhard
Harbola, Varun
Stuhlhofer, Benjamin
Wang, Hongguang
van Aken, Peter A.
Mannhart, Jochen
Hensling, Felix V. E.
Superconductivity
Materials Science
Superconducting films of alpha-Ta are promising candidates for the fabrication of advanced superconducting qubits. However, alpha-Ta films suffer from many growth-induced structural inadequacies that negatively affect their performance. We have therefore explored a new synthesis method for alpha-Ta films which allows the growth of these films with unprecedented quality. Using this method, high quality alpha-Ta films are deposited at a comparably high substrate temperature of 1150 C. They are single-phase alpha-Ta and have a single out-of-plane (110) orientation. They consist of grains above 2 um that have one of three possible in-plane orientations. As shown by scanning transmission electron microscopy and electron energy loss studies the substrate-film interfaces are sharp with no observable intermixing. The obtained insights into the epitaxial growth of body-centered-cubic films on quasi-hexagonal substrates lay the basis for harnessing the high structural coherence of such films in various applications.
title alpha-Ta Films on c-plane Sapphire with Enhanced Microstructure
topic Superconductivity
Materials Science
url https://arxiv.org/abs/2407.16227