Adsorption-controlled Growth of Homoepitaxial c-plane Sapphire Films

Fuente: arXiv
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Main Authors: Majer, Lena N., Acartürk, Tolga, van Aken, Peter A., Braun, Wolfgang, Camuti, Luca, Eckl-Haese, Johan, Mannhart, Jochen, Onuma, Takeyoshi, Rabinovich, Ksenia S., Schlom, Darrell G., Smink, Sander, Starke, Ulrich, Steele, Jacob, Vogt, Patrick, Wang, Hongguang, Hensling, Felix V. E.
Format: Preprint
Published: 2024
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author Majer, Lena N.
Acartürk, Tolga
van Aken, Peter A.
Braun, Wolfgang
Camuti, Luca
Eckl-Haese, Johan
Mannhart, Jochen
Onuma, Takeyoshi
Rabinovich, Ksenia S.
Schlom, Darrell G.
Smink, Sander
Starke, Ulrich
Steele, Jacob
Vogt, Patrick
Wang, Hongguang
Hensling, Felix V. E.
author_facet Majer, Lena N.
Acartürk, Tolga
van Aken, Peter A.
Braun, Wolfgang
Camuti, Luca
Eckl-Haese, Johan
Mannhart, Jochen
Onuma, Takeyoshi
Rabinovich, Ksenia S.
Schlom, Darrell G.
Smink, Sander
Starke, Ulrich
Steele, Jacob
Vogt, Patrick
Wang, Hongguang
Hensling, Felix V. E.
contents Sapphire is a technologically highly relevant material, but it poses many challenges to performing epitaxial thin-film deposition. We have identified and applied the conditions for adsorption-controlled homoepitaxial growth of c-plane sapphire. The films thus grown are atomically smooth, have a controlled termination, and are of outstanding crystallinity. Their chemical purity exceeds that of the substrates. The films exhibit exceptional optical properties such as a single-crystal-like bandgap and a low density of F+ centers.
format Preprint
id arxiv_https___arxiv_org_abs_2407_17194
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle Adsorption-controlled Growth of Homoepitaxial c-plane Sapphire Films
Majer, Lena N.
Acartürk, Tolga
van Aken, Peter A.
Braun, Wolfgang
Camuti, Luca
Eckl-Haese, Johan
Mannhart, Jochen
Onuma, Takeyoshi
Rabinovich, Ksenia S.
Schlom, Darrell G.
Smink, Sander
Starke, Ulrich
Steele, Jacob
Vogt, Patrick
Wang, Hongguang
Hensling, Felix V. E.
Materials Science
Sapphire is a technologically highly relevant material, but it poses many challenges to performing epitaxial thin-film deposition. We have identified and applied the conditions for adsorption-controlled homoepitaxial growth of c-plane sapphire. The films thus grown are atomically smooth, have a controlled termination, and are of outstanding crystallinity. Their chemical purity exceeds that of the substrates. The films exhibit exceptional optical properties such as a single-crystal-like bandgap and a low density of F+ centers.
title Adsorption-controlled Growth of Homoepitaxial c-plane Sapphire Films
topic Materials Science
url https://arxiv.org/abs/2407.17194