Si/AlN p-n heterojunction interfaced with ultrathin SiO2

Fuente: arXiv
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Main Authors: Abbasi, Haris Naeem, Zhou, Jie, Wang, Ding, Sun, Kai, Wang, Ping, Lu, Yi, Gong, Jiarui, Liu, Dong, Liu, Yang, Singh, Ranveer, Mi, Zetian, Ma, Zhenqiang
Format: Preprint
Published: 2024
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author Abbasi, Haris Naeem
Zhou, Jie
Wang, Ding
Sun, Kai
Wang, Ping
Lu, Yi
Gong, Jiarui
Liu, Dong
Liu, Yang
Singh, Ranveer
Mi, Zetian
Ma, Zhenqiang
author_facet Abbasi, Haris Naeem
Zhou, Jie
Wang, Ding
Sun, Kai
Wang, Ping
Lu, Yi
Gong, Jiarui
Liu, Dong
Liu, Yang
Singh, Ranveer
Mi, Zetian
Ma, Zhenqiang
contents Ultra-wide bandgap (UWBG) materials hold immense potential for high-power RF electronics and deep ultraviolet photonics. Among these, AlGaN emerges as a promising candidate, offering a tunable bandgap from 3.4 eV (GaN) to 6.1 eV (AlN) and remarkable material characteristics. However, achieving efficient p-type doping in high aluminum composition AlGaN remains a formidable challenge. This study presents an alternative approach to address this issue by fabricating a p+ Si/n-AlN/n+ AlGaN heterojunction structure by following the semiconductor grafting technique. Atomic force microscopy (AFM) analysis revealed that the AlN and the nanomembrane surface exhibited a smooth topography with a roughness of 1.96 nm and 0.545 nm, respectively. High-angle annular dark field scanning transmission electron microscopy (HAADF-STEM) confirmed a sharp and well-defined Si/AlN interface, with minimal defects and strong chemical bonding, crucial for efficient carrier transport. X-ray photoelectron spectroscopy (XPS) measurements demonstrated a type-I heterojunction with a valence band offset of 2.73 eV-2.84 eV and a conduction band offset of 2.22 eV -2.11 eV. The pn diode devices exhibited a linear current-voltage (I-V) characteristic, an ideality factor of 1.92, and a rectification ratio of 3.3E4, with a turn-on voltage of indicating effective p-n heterojunction. Temperature-dependent I-V measurements showed stable operation up to 90 C. The heterojunction's high-quality interface and electrical performance showcase its potential for advanced AlGaN-based optoelectronic and electronic devices.
format Preprint
id arxiv_https___arxiv_org_abs_2407_17360
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle Si/AlN p-n heterojunction interfaced with ultrathin SiO2
Abbasi, Haris Naeem
Zhou, Jie
Wang, Ding
Sun, Kai
Wang, Ping
Lu, Yi
Gong, Jiarui
Liu, Dong
Liu, Yang
Singh, Ranveer
Mi, Zetian
Ma, Zhenqiang
Applied Physics
Materials Science
Ultra-wide bandgap (UWBG) materials hold immense potential for high-power RF electronics and deep ultraviolet photonics. Among these, AlGaN emerges as a promising candidate, offering a tunable bandgap from 3.4 eV (GaN) to 6.1 eV (AlN) and remarkable material characteristics. However, achieving efficient p-type doping in high aluminum composition AlGaN remains a formidable challenge. This study presents an alternative approach to address this issue by fabricating a p+ Si/n-AlN/n+ AlGaN heterojunction structure by following the semiconductor grafting technique. Atomic force microscopy (AFM) analysis revealed that the AlN and the nanomembrane surface exhibited a smooth topography with a roughness of 1.96 nm and 0.545 nm, respectively. High-angle annular dark field scanning transmission electron microscopy (HAADF-STEM) confirmed a sharp and well-defined Si/AlN interface, with minimal defects and strong chemical bonding, crucial for efficient carrier transport. X-ray photoelectron spectroscopy (XPS) measurements demonstrated a type-I heterojunction with a valence band offset of 2.73 eV-2.84 eV and a conduction band offset of 2.22 eV -2.11 eV. The pn diode devices exhibited a linear current-voltage (I-V) characteristic, an ideality factor of 1.92, and a rectification ratio of 3.3E4, with a turn-on voltage of indicating effective p-n heterojunction. Temperature-dependent I-V measurements showed stable operation up to 90 C. The heterojunction's high-quality interface and electrical performance showcase its potential for advanced AlGaN-based optoelectronic and electronic devices.
title Si/AlN p-n heterojunction interfaced with ultrathin SiO2
topic Applied Physics
Materials Science
url https://arxiv.org/abs/2407.17360