APA (7th ed.) Citation

Ma, Y., Teng, J., Li, X., Sun, X., Wang, Z., Song, Y., . . . Chen, B. (2024). Modeling Inverse Ellipsometry Problem via Flow Matching with a Large-Scale Dataset.

Chicago Style (17th ed.) Citation

Ma, Yiming, Jianzhi Teng, Xinjie Li, Xin Sun, Zhiyong Wang, Yuzhou Song, Lionel Z. Wang, and Bin Chen. Modeling Inverse Ellipsometry Problem via Flow Matching with a Large-Scale Dataset. 2024.

MLA (9th ed.) Citation

Ma, Yiming, et al. Modeling Inverse Ellipsometry Problem via Flow Matching with a Large-Scale Dataset. 2024.