Modeling Inverse Ellipsometry Problem via Flow Matching with a Large-Scale Dataset

Fuente: arXiv
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Bibliographic Details
Main Authors: Ma, Yiming, Teng, Jianzhi, Li, Xinjie, Sun, Xin, Wang, Zhiyong, Song, Yuzhou, Wang, Lionel Z., Chen, Bin
Format: Preprint
Published: 2024
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