Rayleigh Wave Suppression in Al0.6Sc0.4N-on-SiC Resonators
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arXiv
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| Main Authors: | Liffredo, Marco, Stettler, Silvan, Peretti, Federico, Villanueva, Luis Guillermo |
|---|---|
| Format: | Preprint |
| Published: |
2024
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| Online Access: | |
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