Strain rate sensitivity of a Cu/Al$_2$O$_3$ multi-layered thin film

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Auteurs principaux: Kalácska, Szilvia, Pethő, László, Kermouche, Guillaume, Michler, Johann, Ispánovity, Péter Dusán
Format: Preprint
Publié: 2024
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author Kalácska, Szilvia
Pethő, László
Kermouche, Guillaume
Michler, Johann
Ispánovity, Péter Dusán
author_facet Kalácska, Szilvia
Pethő, László
Kermouche, Guillaume
Michler, Johann
Ispánovity, Péter Dusán
contents To study the size and strain rate dependency of copper polycrystalline microstructures, a multi-layered copper/Al$_2$O$_3$ thin film was deposited on a Si substrate using a hybrid deposition system (combining physical vapour and atomic layer deposition). High temperature treatment was applied on the ``As Deposited" material with ultrafine-grained structure to increase the average grain size, resulting in a ``Heat Treated" state with microcrystalline structure. Focused ion beam milling was employed to create square shaped micropillars with two different sizes, that were subjected to compressive loading at various (0.001/s -- 1000/s) strain rates. Differences in the strain rate sensitivity behavior manifesting at low and high strain rates are discussed in the context of the pillar diameters and the grain size of the deformed samples. The Al$_2$O$_3$ interlayer studied by transmission electron microscopy showed excellent thermal stability and grain boundary pinning by precipitation, also resulting in the homogeneous deformation of the pillars and preventing shear localization. Geometrically necessary dislocation densities estimated by high (angular) resolution electron backscatter diffraction presented inhomogeneous dislocation distribution within the deformed pillar volumes, that is attributed to the proximity of the sample edges. Finally, the Al$_2$O$_3$ interlayers successfully suppressed any possible recrystallization processes, contributing to the excellent film stability, that makes the proposed coating ideal to be operating under extreme conditions.
format Preprint
id arxiv_https___arxiv_org_abs_2407_21392
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle Strain rate sensitivity of a Cu/Al$_2$O$_3$ multi-layered thin film
Kalácska, Szilvia
Pethő, László
Kermouche, Guillaume
Michler, Johann
Ispánovity, Péter Dusán
Materials Science
To study the size and strain rate dependency of copper polycrystalline microstructures, a multi-layered copper/Al$_2$O$_3$ thin film was deposited on a Si substrate using a hybrid deposition system (combining physical vapour and atomic layer deposition). High temperature treatment was applied on the ``As Deposited" material with ultrafine-grained structure to increase the average grain size, resulting in a ``Heat Treated" state with microcrystalline structure. Focused ion beam milling was employed to create square shaped micropillars with two different sizes, that were subjected to compressive loading at various (0.001/s -- 1000/s) strain rates. Differences in the strain rate sensitivity behavior manifesting at low and high strain rates are discussed in the context of the pillar diameters and the grain size of the deformed samples. The Al$_2$O$_3$ interlayer studied by transmission electron microscopy showed excellent thermal stability and grain boundary pinning by precipitation, also resulting in the homogeneous deformation of the pillars and preventing shear localization. Geometrically necessary dislocation densities estimated by high (angular) resolution electron backscatter diffraction presented inhomogeneous dislocation distribution within the deformed pillar volumes, that is attributed to the proximity of the sample edges. Finally, the Al$_2$O$_3$ interlayers successfully suppressed any possible recrystallization processes, contributing to the excellent film stability, that makes the proposed coating ideal to be operating under extreme conditions.
title Strain rate sensitivity of a Cu/Al$_2$O$_3$ multi-layered thin film
topic Materials Science
url https://arxiv.org/abs/2407.21392