Silicon Double-Disk Optomechanical Resonators from Wafer-Scale Double-Layered Silicon-on-Insulator

Fuente: arXiv
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Bibliographic Details
Main Authors: Navarathna, Amy, Carey, Benjamin J., Bennett, James S., Khademi, Soroush, Bowen, Warwick P.
Format: Preprint
Published: 2024
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