Silicon Double-Disk Optomechanical Resonators from Wafer-Scale Double-Layered Silicon-on-Insulator
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arXiv
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| Autori principali: | , , , , |
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| Natura: | Preprint |
| Pubblicazione: |
2024
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| _version_ | 1866910929827921920 |
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| author | Navarathna, Amy Carey, Benjamin J. Bennett, James S. Khademi, Soroush Bowen, Warwick P. |
| author_facet | Navarathna, Amy Carey, Benjamin J. Bennett, James S. Khademi, Soroush Bowen, Warwick P. |
| contents | Whispering gallery mode (WGM) optomechanical resonators are a promising technology for the simultaneous control and measurement of optical and mechanical degrees of freedom at the nanoscale. They offer potential for use across a wide range of applications such as sensors and quantum transducers. Double-disk WGM resonators, which host strongly interacting mechanical and optical modes co-localized around their circumference, are particularly attractive due to their high optomechanical coupling. Large-scale integrated fabrication of silicon double-disk WGM resonators has not previously been demonstrated. In this work we present a process for the fabrication of double-layer silicon-on-insulator wafers, which we then use to fabricate functional optomechanical double silicon disk resonators with on-chip optical coupling. The integrated devices present an experimentally observed optical quality factors of the order of 10^5 and a single-photon optomechanical coupling of approximately 15 kHz. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2408_00219 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | Silicon Double-Disk Optomechanical Resonators from Wafer-Scale Double-Layered Silicon-on-Insulator Navarathna, Amy Carey, Benjamin J. Bennett, James S. Khademi, Soroush Bowen, Warwick P. Optics Quantum Physics Whispering gallery mode (WGM) optomechanical resonators are a promising technology for the simultaneous control and measurement of optical and mechanical degrees of freedom at the nanoscale. They offer potential for use across a wide range of applications such as sensors and quantum transducers. Double-disk WGM resonators, which host strongly interacting mechanical and optical modes co-localized around their circumference, are particularly attractive due to their high optomechanical coupling. Large-scale integrated fabrication of silicon double-disk WGM resonators has not previously been demonstrated. In this work we present a process for the fabrication of double-layer silicon-on-insulator wafers, which we then use to fabricate functional optomechanical double silicon disk resonators with on-chip optical coupling. The integrated devices present an experimentally observed optical quality factors of the order of 10^5 and a single-photon optomechanical coupling of approximately 15 kHz. |
| title | Silicon Double-Disk Optomechanical Resonators from Wafer-Scale Double-Layered Silicon-on-Insulator |
| topic | Optics Quantum Physics |
| url | https://arxiv.org/abs/2408.00219 |