Fabrication and characterization of low-loss Al/Si/Al parallel plate capacitors for superconducting quantum information applications

Fuente: arXiv
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Bibliographic Details
Main Authors: McFadden, Anthony, Goswami, Aranya, Zhao, Tongyu, van Schijndel, Teun, Larson, Trevyn F. Q., Sahu, Sudhir, Gill, Stephen, Lecocq, Florent, Simmonds, Raymond, Palmstrøm, Chris
Format: Preprint
Published: 2024
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