Electron-beam-induced modification of gold microparticles in an SEM

Fuente: arXiv
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Main Authors: Weinel, Kristina, Hahn, Marc Benjamin, Lubk, Axel, Feng, Wen, Martinez, Ignacio Gonzalez, Büchner, Bernd, Jácome, Leonardo Agudo
Format: Preprint
Published: 2024
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_version_ 1866909279822282752
author Weinel, Kristina
Hahn, Marc Benjamin
Lubk, Axel
Feng, Wen
Martinez, Ignacio Gonzalez
Büchner, Bernd
Jácome, Leonardo Agudo
author_facet Weinel, Kristina
Hahn, Marc Benjamin
Lubk, Axel
Feng, Wen
Martinez, Ignacio Gonzalez
Büchner, Bernd
Jácome, Leonardo Agudo
contents Electron-beam-induced conversion of materials in a transmission electron microscope uses the high power density of a localized electron beam of acceleration voltages above 100 kV as an energy source to transform matter at the sub-micron scale. Here, the e-beam-induced transformation of precursor microparticles employing a low-energy e-beam with an acceleration voltage of 30 kV in a scanning electron microscope is developed to increase the versatility and efficiency of the technique. Under these conditions, the technique can be classified between e-beam lithography, where the e-beam is used to mill holes in or grow some different material onto a substrate, and e-beam welding, where matter can be welded together when overcoming the melting phase. Modifying gold microparticles on an amorphous SiOx substrate reveals the dominant role of inelastic electron-matter interaction and subsequent localized heating for the observed melting and vaporization of the precursor microparticles under the electron beam. Monte-Carlo scattering simulations and thermodynamic modeling further support the findings.
format Preprint
id arxiv_https___arxiv_org_abs_2408_02409
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle Electron-beam-induced modification of gold microparticles in an SEM
Weinel, Kristina
Hahn, Marc Benjamin
Lubk, Axel
Feng, Wen
Martinez, Ignacio Gonzalez
Büchner, Bernd
Jácome, Leonardo Agudo
Materials Science
Electron-beam-induced conversion of materials in a transmission electron microscope uses the high power density of a localized electron beam of acceleration voltages above 100 kV as an energy source to transform matter at the sub-micron scale. Here, the e-beam-induced transformation of precursor microparticles employing a low-energy e-beam with an acceleration voltage of 30 kV in a scanning electron microscope is developed to increase the versatility and efficiency of the technique. Under these conditions, the technique can be classified between e-beam lithography, where the e-beam is used to mill holes in or grow some different material onto a substrate, and e-beam welding, where matter can be welded together when overcoming the melting phase. Modifying gold microparticles on an amorphous SiOx substrate reveals the dominant role of inelastic electron-matter interaction and subsequent localized heating for the observed melting and vaporization of the precursor microparticles under the electron beam. Monte-Carlo scattering simulations and thermodynamic modeling further support the findings.
title Electron-beam-induced modification of gold microparticles in an SEM
topic Materials Science
url https://arxiv.org/abs/2408.02409