Electron-beam-induced modification of gold microparticles in an SEM
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arXiv
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| Main Authors: | , , , , , , |
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| Format: | Preprint |
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2024
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| _version_ | 1866909279822282752 |
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| author | Weinel, Kristina Hahn, Marc Benjamin Lubk, Axel Feng, Wen Martinez, Ignacio Gonzalez Büchner, Bernd Jácome, Leonardo Agudo |
| author_facet | Weinel, Kristina Hahn, Marc Benjamin Lubk, Axel Feng, Wen Martinez, Ignacio Gonzalez Büchner, Bernd Jácome, Leonardo Agudo |
| contents | Electron-beam-induced conversion of materials in a transmission electron microscope uses the high power density of a localized electron beam of acceleration voltages above 100 kV as an energy source to transform matter at the sub-micron scale. Here, the e-beam-induced transformation of precursor microparticles employing a low-energy e-beam with an acceleration voltage of 30 kV in a scanning electron microscope is developed to increase the versatility and efficiency of the technique. Under these conditions, the technique can be classified between e-beam lithography, where the e-beam is used to mill holes in or grow some different material onto a substrate, and e-beam welding, where matter can be welded together when overcoming the melting phase. Modifying gold microparticles on an amorphous SiOx substrate reveals the dominant role of inelastic electron-matter interaction and subsequent localized heating for the observed melting and vaporization of the precursor microparticles under the electron beam. Monte-Carlo scattering simulations and thermodynamic modeling further support the findings. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2408_02409 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | Electron-beam-induced modification of gold microparticles in an SEM Weinel, Kristina Hahn, Marc Benjamin Lubk, Axel Feng, Wen Martinez, Ignacio Gonzalez Büchner, Bernd Jácome, Leonardo Agudo Materials Science Electron-beam-induced conversion of materials in a transmission electron microscope uses the high power density of a localized electron beam of acceleration voltages above 100 kV as an energy source to transform matter at the sub-micron scale. Here, the e-beam-induced transformation of precursor microparticles employing a low-energy e-beam with an acceleration voltage of 30 kV in a scanning electron microscope is developed to increase the versatility and efficiency of the technique. Under these conditions, the technique can be classified between e-beam lithography, where the e-beam is used to mill holes in or grow some different material onto a substrate, and e-beam welding, where matter can be welded together when overcoming the melting phase. Modifying gold microparticles on an amorphous SiOx substrate reveals the dominant role of inelastic electron-matter interaction and subsequent localized heating for the observed melting and vaporization of the precursor microparticles under the electron beam. Monte-Carlo scattering simulations and thermodynamic modeling further support the findings. |
| title | Electron-beam-induced modification of gold microparticles in an SEM |
| topic | Materials Science |
| url | https://arxiv.org/abs/2408.02409 |