Look What You Made Me Glue: SEMGluTM Enabled Alternative Cryogenic Sample Preparation Process for Cryogenic Atom Probe Tomography Studies

Fuente: arXiv
Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Mulcahy, Neil, Douglas, James O, Conroy, Michele
Format: Preprint
Veröffentlicht: 2024
Schlagworte:
Online-Zugang:
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
_version_ 1866929451482218496
author Mulcahy, Neil
Douglas, James O
Conroy, Michele
author_facet Mulcahy, Neil
Douglas, James O
Conroy, Michele
contents Extensive efforts over the past number of years have been applied to develop workflows for sample preparation of specimens for atom probe tomography at cryogenic temperatures. This is primarily due to the difficulty involved in preparing site specific lift out samples at cryogenic temperatures without the assistance of the gas injection system (GIS) as using it under cryogenic conditions leads to nonuniform and difficult to control deposition. Building on the efforts of previously developed GIS free workflows utilising redeposition techniques, this work provides an alternative approach using SEMGluTM, which is an electron beam curing adhesive that remains usable at cryogenic temperatures, to both lift out cryogenically frozen samples, and mount these samples to Si microarray posts for subsequent redeposition welding. This approach is applicable for a full cryogenic workflow but is particularly useful for non-fully cryogenic workflows such as beam sensitive samples, samples that mill easily, and samples with challenging geometries. We demonstrate atom probe analysis of silicon samples in both laser pulsing and voltage mode prepared using this workflow, with comparable analytical performance to a pre-sharpened microtip coupon. An application-based example which directly benefits from this approach, correlative Liquid Cell Transmission Electron Microscopy and cryogenic Atom Probe Tomography sample preparation, is also shown.
format Preprint
id arxiv_https___arxiv_org_abs_2408_03566
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle Look What You Made Me Glue: SEMGluTM Enabled Alternative Cryogenic Sample Preparation Process for Cryogenic Atom Probe Tomography Studies
Mulcahy, Neil
Douglas, James O
Conroy, Michele
Materials Science
Instrumentation and Detectors
Extensive efforts over the past number of years have been applied to develop workflows for sample preparation of specimens for atom probe tomography at cryogenic temperatures. This is primarily due to the difficulty involved in preparing site specific lift out samples at cryogenic temperatures without the assistance of the gas injection system (GIS) as using it under cryogenic conditions leads to nonuniform and difficult to control deposition. Building on the efforts of previously developed GIS free workflows utilising redeposition techniques, this work provides an alternative approach using SEMGluTM, which is an electron beam curing adhesive that remains usable at cryogenic temperatures, to both lift out cryogenically frozen samples, and mount these samples to Si microarray posts for subsequent redeposition welding. This approach is applicable for a full cryogenic workflow but is particularly useful for non-fully cryogenic workflows such as beam sensitive samples, samples that mill easily, and samples with challenging geometries. We demonstrate atom probe analysis of silicon samples in both laser pulsing and voltage mode prepared using this workflow, with comparable analytical performance to a pre-sharpened microtip coupon. An application-based example which directly benefits from this approach, correlative Liquid Cell Transmission Electron Microscopy and cryogenic Atom Probe Tomography sample preparation, is also shown.
title Look What You Made Me Glue: SEMGluTM Enabled Alternative Cryogenic Sample Preparation Process for Cryogenic Atom Probe Tomography Studies
topic Materials Science
Instrumentation and Detectors
url https://arxiv.org/abs/2408.03566