Lift-off free catalyst for metal assisted chemical etching of silicon in vapour phase

Fuente: arXiv

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Bibliographic Details
Main Authors:	Ohlin, Hanna, Benz, Bryan, Romano, Lucia, Vogt, Ulrich
Format:	Preprint
Published:	2024
Subjects:	Materials Science Applied Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2408.03702