Yang, Z., Wei, X., Roy, P., Zhang, D., Lu, P., Dhole, S., . . . Zhu, M. (2024). CMOS-Compatible Ultrathin Superconducting NbN Thin Films Deposited by Reactive Ion Sputtering on 300 mm Si Wafer.
Chicago Style (17th ed.) CitationYang, Zihao, et al. CMOS-Compatible Ultrathin Superconducting NbN Thin Films Deposited by Reactive Ion Sputtering on 300 Mm Si Wafer. 2024.
MLA (9th ed.) CitationYang, Zihao, et al. CMOS-Compatible Ultrathin Superconducting NbN Thin Films Deposited by Reactive Ion Sputtering on 300 Mm Si Wafer. 2024.
Warning: These citations may not always be 100% accurate.