Cita APA (7a ed.)

Yang, Z., Wei, X., Roy, P., Zhang, D., Lu, P., Dhole, S., . . . Zhu, M. (2024). CMOS-Compatible Ultrathin Superconducting NbN Thin Films Deposited by Reactive Ion Sputtering on 300 mm Si Wafer.

Cita Chicago Style (17a ed.)

Yang, Zihao, et al. CMOS-Compatible Ultrathin Superconducting NbN Thin Films Deposited by Reactive Ion Sputtering on 300 Mm Si Wafer. 2024.

Cita MLA (9a ed.)

Yang, Zihao, et al. CMOS-Compatible Ultrathin Superconducting NbN Thin Films Deposited by Reactive Ion Sputtering on 300 Mm Si Wafer. 2024.