In-situ Patterned Damage-Free Etching of 3-Dimensional Structures in \b{eta}-Ga2O3 using Triethylgallium

Fuente: arXiv

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Bibliographic Details
Main Authors:	Das, Nabasindhu, Alema, Fikadu, Brand, William, Katta, Abishek, Gilankar, Advait, Osinsky, Andrei, Kalarickal, Nidhin Kurian
Format:	Preprint
Published:	2024
Subjects:	Materials Science Applied Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2408.05824