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In-situ Patterned Damage-Free Etching of 3-Dimensional Structures in \b{eta}-Ga2O3 using Triethylgallium

Fuente: arXiv

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Detalles Bibliográficos
Autores principales:	Das, Nabasindhu, Alema, Fikadu, Brand, William, Katta, Abishek, Gilankar, Advait, Osinsky, Andrei, Kalarickal, Nidhin Kurian
Formato:	Preprint
Publicado:	2024
Materias:	Materials Science Applied Physics
Acceso en línea:	Acceder al recurso
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!

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