Role of the Casimir force in micro- and nanoelectromechanical pressure sensors
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arXiv
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| Main Authors: | Klimchitskaya, G. L., Korotkov, A. S., Loboda, V. V., Mostepanenko, V. M. |
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| Format: | Preprint |
| Published: |
2024
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| Online Access: | |
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