Bilayer TeO2: The First Oxide Semiconductor with Symmetric Sub-5-nm NMOS and PMOS

Fuente: arXiv
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Autores principales: Xu, Linqiang, Zhao, Liya, Lau, Chit Siong, Zhang, Pan, Xu, Lianqiang, Li, Qiuhui, Fang, Shibo, Ang, Yee Sin, Sun, Xiaotian, Lu, Jing
Formato: Preprint
Publicado: 2024
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author Xu, Linqiang
Zhao, Liya
Lau, Chit Siong
Zhang, Pan
Xu, Lianqiang
Li, Qiuhui
Fang, Shibo
Ang, Yee Sin
Sun, Xiaotian
Lu, Jing
author_facet Xu, Linqiang
Zhao, Liya
Lau, Chit Siong
Zhang, Pan
Xu, Lianqiang
Li, Qiuhui
Fang, Shibo
Ang, Yee Sin
Sun, Xiaotian
Lu, Jing
contents Wide bandgap oxide semiconductors are very promising channel candidates for next-generation electronics due to their large-area manufacturing, high-quality dielectrics, low contact resistance, and low leakage current. However, the absence of ultra-short gate length (Lg) p-type transistors has restricted their application in future complementary metal-oxide-semiconductor (CMOS) integration. Inspired by the successfully grown high-hole mobility bilayer (BL) beta tellurium dioxide (\b{eta}-TeO2), we investigate the performance of sub-5-nm-Lg BL \b{eta}-TeO2 field-effect transistors (FETs) by utilizing first-principles quantum transport simulation. The distinctive anisotropy of BL \b{eta}-TeO2 yields different transport properties. In the y-direction, both the sub-5-nm-Lg n-type and p-type BL \b{eta}-TeO2 FETs can fulfill the International Technology Roadmap for Semiconductors (ITRS) criteria for high-performance (HP) devices, which are superior to the reported oxide FETs (only n-type). Remarkably, we for the first time demonstrate the existence of the NMOS and PMOS symmetry in sub-5-nm-Lg oxide semiconductor FETs. As to the x-direction, the n-type BL \b{eta}-TeO2 FETs satisfy both the ITRS HP and low-power (LP) requirements with Lg down to 3 nm. Consequently, our work shed light on the tremendous prospects of BL \b{eta}-TeO2 for CMOS application.
format Preprint
id arxiv_https___arxiv_org_abs_2408_07339
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle Bilayer TeO2: The First Oxide Semiconductor with Symmetric Sub-5-nm NMOS and PMOS
Xu, Linqiang
Zhao, Liya
Lau, Chit Siong
Zhang, Pan
Xu, Lianqiang
Li, Qiuhui
Fang, Shibo
Ang, Yee Sin
Sun, Xiaotian
Lu, Jing
Mesoscale and Nanoscale Physics
Wide bandgap oxide semiconductors are very promising channel candidates for next-generation electronics due to their large-area manufacturing, high-quality dielectrics, low contact resistance, and low leakage current. However, the absence of ultra-short gate length (Lg) p-type transistors has restricted their application in future complementary metal-oxide-semiconductor (CMOS) integration. Inspired by the successfully grown high-hole mobility bilayer (BL) beta tellurium dioxide (\b{eta}-TeO2), we investigate the performance of sub-5-nm-Lg BL \b{eta}-TeO2 field-effect transistors (FETs) by utilizing first-principles quantum transport simulation. The distinctive anisotropy of BL \b{eta}-TeO2 yields different transport properties. In the y-direction, both the sub-5-nm-Lg n-type and p-type BL \b{eta}-TeO2 FETs can fulfill the International Technology Roadmap for Semiconductors (ITRS) criteria for high-performance (HP) devices, which are superior to the reported oxide FETs (only n-type). Remarkably, we for the first time demonstrate the existence of the NMOS and PMOS symmetry in sub-5-nm-Lg oxide semiconductor FETs. As to the x-direction, the n-type BL \b{eta}-TeO2 FETs satisfy both the ITRS HP and low-power (LP) requirements with Lg down to 3 nm. Consequently, our work shed light on the tremendous prospects of BL \b{eta}-TeO2 for CMOS application.
title Bilayer TeO2: The First Oxide Semiconductor with Symmetric Sub-5-nm NMOS and PMOS
topic Mesoscale and Nanoscale Physics
url https://arxiv.org/abs/2408.07339