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Differentiable Edge-based OPC

Fuente: arXiv

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Détails bibliographiques
Auteurs principaux:	Chen, Guojin, Yang, Haoyu, Ren, Haoxing, Yu, Bei, Pan, David Z.
Format:	Preprint
Publié:	2024
Sujets:	Artificial Intelligence Optics
Accès en ligne:	Acceder al recurso
Tags:	Ajouter un tag Pas de tags, Soyez le premier à ajouter un tag!

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