Angstrom-scale ion-beam engineering of ultrathin buried oxides for quantum and neuro-inspired computing

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Auteurs principaux: Smirnov, N., Krivko, E., Moskaleva, D., Moskalev, D., Solovieva, A., Echeistov, V., Zikiy, E., Korshakov, N., Ivanov, A., Malevannaya, E., Matanin, A., Polozov, V., Teleganov, M., Zhitkov, N., Romashkin, R., Korobenko, I., Yanilkin, A., Lebedev, A., Ryzhikov, I., Andriyash, A., Rodionov, I.
Format: Preprint
Publié: 2024
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author Smirnov, N.
Krivko, E.
Moskaleva, D.
Moskalev, D.
Solovieva, A.
Echeistov, V.
Zikiy, E.
Korshakov, N.
Ivanov, A.
Malevannaya, E.
Matanin, A.
Polozov, V.
Teleganov, M.
Zhitkov, N.
Romashkin, R.
Korobenko, I.
Yanilkin, A.
Lebedev, A.
Ryzhikov, I.
Andriyash, A.
Rodionov, I.
author_facet Smirnov, N.
Krivko, E.
Moskaleva, D.
Moskalev, D.
Solovieva, A.
Echeistov, V.
Zikiy, E.
Korshakov, N.
Ivanov, A.
Malevannaya, E.
Matanin, A.
Polozov, V.
Teleganov, M.
Zhitkov, N.
Romashkin, R.
Korobenko, I.
Yanilkin, A.
Lebedev, A.
Ryzhikov, I.
Andriyash, A.
Rodionov, I.
contents Multilayer nanoscale systems incorporating buried ultrathin tunnel oxides, 2D materials, and solid electrolytes are crucial for next-generation logics, memory, quantum and neuro-inspired computing. Still, an ultrathin layer control at angstrom scale is challenging for cutting-edge applications. Here we introduce a scalable approach utilizing focused ion-beam annealing for buried ultrathin oxides engineering with angstrom-scale thickness control. Our molecular dynamics simulations of Ne+ irradiation on Al/a-AlOx/Al structure confirms the pivotal role of ion generated crystal defects. We experimentally demonstrate its performance on Josephson junction tunning in the resistance range of 2 to 37% with a standard deviation of 0.86% across 25x25 mm chip. Moreover, we showcase +-17 MHz frequency control (+-0.172 A tunnel barrier thickness) for superconducting transmon qubits with coherence times up to 500 us, which is promising for useful fault-tolerant quantum computing. This work ensures ultrathin multilayer nanosystems engineering at the ultimate scale by depth-controlled crystal defects generation.
format Preprint
id arxiv_https___arxiv_org_abs_2408_10138
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle Angstrom-scale ion-beam engineering of ultrathin buried oxides for quantum and neuro-inspired computing
Smirnov, N.
Krivko, E.
Moskaleva, D.
Moskalev, D.
Solovieva, A.
Echeistov, V.
Zikiy, E.
Korshakov, N.
Ivanov, A.
Malevannaya, E.
Matanin, A.
Polozov, V.
Teleganov, M.
Zhitkov, N.
Romashkin, R.
Korobenko, I.
Yanilkin, A.
Lebedev, A.
Ryzhikov, I.
Andriyash, A.
Rodionov, I.
Mesoscale and Nanoscale Physics
Materials Science
Applied Physics
Quantum Physics
Multilayer nanoscale systems incorporating buried ultrathin tunnel oxides, 2D materials, and solid electrolytes are crucial for next-generation logics, memory, quantum and neuro-inspired computing. Still, an ultrathin layer control at angstrom scale is challenging for cutting-edge applications. Here we introduce a scalable approach utilizing focused ion-beam annealing for buried ultrathin oxides engineering with angstrom-scale thickness control. Our molecular dynamics simulations of Ne+ irradiation on Al/a-AlOx/Al structure confirms the pivotal role of ion generated crystal defects. We experimentally demonstrate its performance on Josephson junction tunning in the resistance range of 2 to 37% with a standard deviation of 0.86% across 25x25 mm chip. Moreover, we showcase +-17 MHz frequency control (+-0.172 A tunnel barrier thickness) for superconducting transmon qubits with coherence times up to 500 us, which is promising for useful fault-tolerant quantum computing. This work ensures ultrathin multilayer nanosystems engineering at the ultimate scale by depth-controlled crystal defects generation.
title Angstrom-scale ion-beam engineering of ultrathin buried oxides for quantum and neuro-inspired computing
topic Mesoscale and Nanoscale Physics
Materials Science
Applied Physics
Quantum Physics
url https://arxiv.org/abs/2408.10138