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High quality epitaxial piezoelectric and ferroelectric wurtzite Al$_{1-x}$Sc$_x$N thin films

Fuente: arXiv

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Bibliographic Details
Main Authors:	Zeng, Yang, Lei, Yihan, Wang, Yanghe, Cheng, Mingqiang, Liao, Luocheng, Wang, Xuyang, Ge, Jinxin, Liu, Zhenghao, Ming, Wenjie, Li, Chao, Xie, Shuhong, Li, Jiangyu, Li, Changjian
Format:	Preprint
Published:	2024
Subjects:	Applied Physics Materials Science
Online Access:	Acceder al recurso
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