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| Format: | Preprint |
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2024
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| Online-Zugang: | https://arxiv.org/abs/2408.12044 |
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| _version_ | 1866912005168824320 |
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| author | Zhang, Aixin Ringuala, Dhruve A. Mircovich, Matthew A. Roldan, Manuel A. Kouvetakis, John Menéndez, José |
| author_facet | Zhang, Aixin Ringuala, Dhruve A. Mircovich, Matthew A. Roldan, Manuel A. Kouvetakis, John Menéndez, José |
| contents | $\rm{Ge}_{1-x-y}Si_{x}Sn_{y}$ alloys were grown on Ge buffer layers at ultra-low temperature using reactions of $\rm SnH_{4}$ and $\rm GeH_{3}Cl$ for the first time. The latter is a newly introduced CVD source designed for epitaxial development of group IV semiconductors under low thermal budgets and CMOS compatible conditions. The $\rm{Ge}_{1-x-y}Si_{x}Sn_{y}$ films were produced between 160-200oC with 3-5% Si and ~ 5-11 % Sn, which traverses the indirect to direct gap transition in Ge-Sn materials. The films were fully strained to Ge and exhibited defect-free microstructures, flat surfaces, homogeneous compositions, uniform thicknesses and sharp interfaces as required for device manufacturing. A comparative study was then conducted to investigate the applicability of $\rm GeH_{3}Cl$ for the synthesis of $\rm Ge_{1-y}Sn_{y}$ binaries under similar experimental conditions. The$\rm Ge_{1-y}Sn_{y}$ films were grown fully strained to Ge, but with reduced Sn compositions ranging from ~ 2 - 7 % and lower thicknesses relative to $\rm{Ge}_{1-x-y}Si_{x}Sn_{y}$. This prompted efforts to further investigate the growth behavior of $\rm Ge_{1-y}Sn_{y}$ using the $\rm GeH_{3}Cl$ method, bypassing the Ge buffer to produce samples directly on Si, with the aim of exploring how to manage interface strain. In this case the $\rm Ge_{1-y}Sn_{y}$ on Si films exhibited compositions and thicknesses comparable to $\rm Ge_{1-y}Sn_{y}$-on-Ge films; however, their strain states were mostly relaxed, presumably due to the large misfit between $\rm Ge_{1-y}Sn_{y}$ and Si. Efforts to increase the concentration and thickness of these samples resulted in non-homogeneous multi-phase materials containing large amounts of interstitial Sn impurities. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2408_12044 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | Synthesis of Group-IV ternary and binary semiconductors using epitaxy of $\rm GeH_3Cl$ and $\rm SnH_4$ Zhang, Aixin Ringuala, Dhruve A. Mircovich, Matthew A. Roldan, Manuel A. Kouvetakis, John Menéndez, José Materials Science $\rm{Ge}_{1-x-y}Si_{x}Sn_{y}$ alloys were grown on Ge buffer layers at ultra-low temperature using reactions of $\rm SnH_{4}$ and $\rm GeH_{3}Cl$ for the first time. The latter is a newly introduced CVD source designed for epitaxial development of group IV semiconductors under low thermal budgets and CMOS compatible conditions. The $\rm{Ge}_{1-x-y}Si_{x}Sn_{y}$ films were produced between 160-200oC with 3-5% Si and ~ 5-11 % Sn, which traverses the indirect to direct gap transition in Ge-Sn materials. The films were fully strained to Ge and exhibited defect-free microstructures, flat surfaces, homogeneous compositions, uniform thicknesses and sharp interfaces as required for device manufacturing. A comparative study was then conducted to investigate the applicability of $\rm GeH_{3}Cl$ for the synthesis of $\rm Ge_{1-y}Sn_{y}$ binaries under similar experimental conditions. The$\rm Ge_{1-y}Sn_{y}$ films were grown fully strained to Ge, but with reduced Sn compositions ranging from ~ 2 - 7 % and lower thicknesses relative to $\rm{Ge}_{1-x-y}Si_{x}Sn_{y}$. This prompted efforts to further investigate the growth behavior of $\rm Ge_{1-y}Sn_{y}$ using the $\rm GeH_{3}Cl$ method, bypassing the Ge buffer to produce samples directly on Si, with the aim of exploring how to manage interface strain. In this case the $\rm Ge_{1-y}Sn_{y}$ on Si films exhibited compositions and thicknesses comparable to $\rm Ge_{1-y}Sn_{y}$-on-Ge films; however, their strain states were mostly relaxed, presumably due to the large misfit between $\rm Ge_{1-y}Sn_{y}$ and Si. Efforts to increase the concentration and thickness of these samples resulted in non-homogeneous multi-phase materials containing large amounts of interstitial Sn impurities. |
| title | Synthesis of Group-IV ternary and binary semiconductors using epitaxy of $\rm GeH_3Cl$ and $\rm SnH_4$ |
| topic | Materials Science |
| url | https://arxiv.org/abs/2408.12044 |