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Low Temperature Deposition of Functional Thin Films on Insulating Substrates: Selective Ion Acceleration using Synchronized Floating Potential HiPIMS

Fuente: arXiv

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Bibliographic Details
Main Authors:	Patidar, Jyotish, Pshyk, Oleksandr, Sommerhäuser, Lars, Siol, Sebastian
Format:	Preprint
Published:	2024
Subjects:	Applied Physics Materials Science
Online Access:	Acceder al recurso
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