>3kV NiO/Ga2O3 Heterojunction Diodes with Space-Modulated Junction Termination Extension and Sub-1V Turn-on

Fuente: arXiv
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Autori principali: Gilankar, Advait, Katta, Abishek, Das, Nabasindhu, Kalarickal, Nidhin Kurian
Natura: Preprint
Pubblicazione: 2024
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author Gilankar, Advait
Katta, Abishek
Das, Nabasindhu
Kalarickal, Nidhin Kurian
author_facet Gilankar, Advait
Katta, Abishek
Das, Nabasindhu
Kalarickal, Nidhin Kurian
contents This work demonstrates high-performance vertical NiO/Ga2O3 heterojunction diodes (HJDs) with a 2-step space-modulated junction termination extension. Distinct from the current state-of-the-art Ga2O3 HJDs, we achieve breakdown voltage exceeding 3 kV with a low turn on voltage (VON) of 0.8V, estimated at a forward current density (IF) of 1 A-cm-2. The measured devices exhibit excellent turn-on characteristics achieving 100 A-cm-2 current density at a forward bias of 1.5V along with a low differential specific on-resistance (Ron,sp) of 4.4 mΩ-cm2. The SM-JTE was realized using concentric NiO rings with varying widths and spacing that approximates a gradual reduction in JTE charge. The unipolar figure of merit (FOM) calculated exceeds 2 GW-cm2 and is among the best reported for devices with a sub-1V turn-on. The fabricated devices also displayed minimal change in forward I-V characteristics post reverse bias stress of 3 kV applied during breakdown voltage testing.
format Preprint
id arxiv_https___arxiv_org_abs_2409_00344
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle >3kV NiO/Ga2O3 Heterojunction Diodes with Space-Modulated Junction Termination Extension and Sub-1V Turn-on
Gilankar, Advait
Katta, Abishek
Das, Nabasindhu
Kalarickal, Nidhin Kurian
Applied Physics
This work demonstrates high-performance vertical NiO/Ga2O3 heterojunction diodes (HJDs) with a 2-step space-modulated junction termination extension. Distinct from the current state-of-the-art Ga2O3 HJDs, we achieve breakdown voltage exceeding 3 kV with a low turn on voltage (VON) of 0.8V, estimated at a forward current density (IF) of 1 A-cm-2. The measured devices exhibit excellent turn-on characteristics achieving 100 A-cm-2 current density at a forward bias of 1.5V along with a low differential specific on-resistance (Ron,sp) of 4.4 mΩ-cm2. The SM-JTE was realized using concentric NiO rings with varying widths and spacing that approximates a gradual reduction in JTE charge. The unipolar figure of merit (FOM) calculated exceeds 2 GW-cm2 and is among the best reported for devices with a sub-1V turn-on. The fabricated devices also displayed minimal change in forward I-V characteristics post reverse bias stress of 3 kV applied during breakdown voltage testing.
title >3kV NiO/Ga2O3 Heterojunction Diodes with Space-Modulated Junction Termination Extension and Sub-1V Turn-on
topic Applied Physics
url https://arxiv.org/abs/2409.00344