Copertina

The role of sputtered atom and ion energy distribution in films deposited by Physical Vapor Deposition: A molecular dynamics approach

Fuente: arXiv

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Dettagli Bibliografici
Autori principali:	Atmane, Soumya, Alexandre, Maroussiak, Caillard, Amaël, Thomann, Anne-Lise, Kateb, Movaffaq, Gudmundsson, Jón Tómas, Brault, Pascal
Natura:	Preprint
Pubblicazione:	2024
Soggetti:	Computational Physics Plasma Physics
Accesso online:	Acceder al recurso
Tags:	Aggiungi Tag Nessun Tag, puoi essere il primo ad aggiungerne!!

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