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Piezoresistive PtSe$_2$ pressure sensors with reliable high sensitivity and their integration into CMOS ASIC substrates

Fuente: arXiv

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Bibliographic Details
Main Authors:	Lukas, Sebastian, Rademacher, Nico, Cruces, Sofía, Gross, Michael, Desgué, Eva, Heiserer, Stefan, Dominik, Nikolas, Prechtl, Maximilian, Hartwig, Oliver, Coileáin, Cormac Ó, Stimpel-Lindner, Tanja, Legagneux, Pierre, Rantala, Arto, Saari, Juha-Matti, Soikkeli, Miika, Duesberg, Georg S., Lemme, Max C.
Format:	Preprint
Published:	2024
Subjects:	Applied Physics
Online Access:	Acceder al recurso
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