APA (7th ed.) Citation

Dey, B., Monden, M., Blanco, V., Halder, S., & De Gendt, S. (2024). Advancing SEM Based Nano-Scale Defect Analysis in Semiconductor Manufacturing for Advanced IC Nodes.

Chicago Style (17th ed.) Citation

Dey, Bappaditya, Matthias Monden, Victor Blanco, Sandip Halder, and Stefan De Gendt. Advancing SEM Based Nano-Scale Defect Analysis in Semiconductor Manufacturing for Advanced IC Nodes. 2024.

MLA (9th ed.) Citation

Dey, Bappaditya, et al. Advancing SEM Based Nano-Scale Defect Analysis in Semiconductor Manufacturing for Advanced IC Nodes. 2024.