Enregistré dans:
| Auteurs principaux: | , , , |
|---|---|
| Format: | Preprint |
| Publié: |
2024
|
| Sujets: | |
| Accès en ligne: | https://arxiv.org/abs/2409.04333 |
| Tags: |
Ajouter un tag
Pas de tags, Soyez le premier à ajouter un tag!
|
| _version_ | 1866916384766689280 |
|---|---|
| author | Ruggeri, Jacopo Ausserlechner, Udo Köck, Helmut Dowling, Karen M. |
| author_facet | Ruggeri, Jacopo Ausserlechner, Udo Köck, Helmut Dowling, Karen M. |
| contents | Microelectronic magnetic sensors are essential in diverse applications, including automotive, industrial, and consumer electronics. Hall-effect devices hold the largest share of the magnetic sensor market, and they are particularly valued for their reliability, low cost and CMOS compatibility. This paper introduces a novel 3-axis Hall-effect sensor element based on an inverted pyramid structure, realized by leveraging MEMS micromachining and CMOS processing. The devices are manufactured by etching the pyramid openings with TMAH and implanting the sloped walls with n-dopants to define the active area. Through the use of various bias-sense detection modes, the device is able to detect both in-plane and out-of-plane magnetic fields within a single compact structure. In addition, the offset can be significantly reduced by one to three orders of magnitude by employing the current-spinning method. The device presented in this work demonstrated high in-plane and out-of-plane current- and voltage-related sensitivities ranging between 64.1 to 198 V A$^{-1}$ T$^{-1}$ and 14.8 to 21.4 mV V$^{-1}$ T$^{-1}$, with crosstalk below 3.7 %. The sensor exhibits a thermal noise floor which corresponds to approximately 0.5 $μ$T/$\sqrt{Hz}$ at 1.31 V supply. This novel Hall-effect sensor represents a promising and simpler alternative to existing state-of-the-art 3-axis magnetic sensors, offering a viable solution for precise and reliable magnetic field sensing in various applications such as position feedback and power monitoring. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2409_04333 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | Inverted Pyramid 3-axis Silicon Hall Effect Magnetic Sensor With Offset Cancellation Ruggeri, Jacopo Ausserlechner, Udo Köck, Helmut Dowling, Karen M. Instrumentation and Detectors Microelectronic magnetic sensors are essential in diverse applications, including automotive, industrial, and consumer electronics. Hall-effect devices hold the largest share of the magnetic sensor market, and they are particularly valued for their reliability, low cost and CMOS compatibility. This paper introduces a novel 3-axis Hall-effect sensor element based on an inverted pyramid structure, realized by leveraging MEMS micromachining and CMOS processing. The devices are manufactured by etching the pyramid openings with TMAH and implanting the sloped walls with n-dopants to define the active area. Through the use of various bias-sense detection modes, the device is able to detect both in-plane and out-of-plane magnetic fields within a single compact structure. In addition, the offset can be significantly reduced by one to three orders of magnitude by employing the current-spinning method. The device presented in this work demonstrated high in-plane and out-of-plane current- and voltage-related sensitivities ranging between 64.1 to 198 V A$^{-1}$ T$^{-1}$ and 14.8 to 21.4 mV V$^{-1}$ T$^{-1}$, with crosstalk below 3.7 %. The sensor exhibits a thermal noise floor which corresponds to approximately 0.5 $μ$T/$\sqrt{Hz}$ at 1.31 V supply. This novel Hall-effect sensor represents a promising and simpler alternative to existing state-of-the-art 3-axis magnetic sensors, offering a viable solution for precise and reliable magnetic field sensing in various applications such as position feedback and power monitoring. |
| title | Inverted Pyramid 3-axis Silicon Hall Effect Magnetic Sensor With Offset Cancellation |
| topic | Instrumentation and Detectors |
| url | https://arxiv.org/abs/2409.04333 |