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| Main Authors: | , , |
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| Format: | Preprint |
| Published: |
2024
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| Subjects: | |
| Online Access: | https://arxiv.org/abs/2409.04586 |
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| _version_ | 1866910593250754560 |
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| author | Poveda-Hospital, Salvador Quesada, Nicolás Peter, Yves-Alain |
| author_facet | Poveda-Hospital, Salvador Quesada, Nicolás Peter, Yves-Alain |
| contents | We investigate the etching characteristics of PIN-PMN-PT crystals, exploring various wet etching solutions, reactive ion etching gases, and ion beam etching. The etch rate and surface roughness are systematically measured for each method. A process flow to obtain PIN-PMN-PT thin films is described and performed to later build a single mode rib waveguide. An integrated electro-optic phase modulator is fabricated by depositing electrodes on the sides of the waveguides. The electro-optic coefficient implied in our phase modulators is the $r_{51}/r_{42}$. The performances are tested achieving a $V_πL$ of 19.2 V$\cdot$cm. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2409_04586 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | Etching Properties of PIN-PMN-PT and its Integration in Electro-Optic Phase Modulators Poveda-Hospital, Salvador Quesada, Nicolás Peter, Yves-Alain Optics We investigate the etching characteristics of PIN-PMN-PT crystals, exploring various wet etching solutions, reactive ion etching gases, and ion beam etching. The etch rate and surface roughness are systematically measured for each method. A process flow to obtain PIN-PMN-PT thin films is described and performed to later build a single mode rib waveguide. An integrated electro-optic phase modulator is fabricated by depositing electrodes on the sides of the waveguides. The electro-optic coefficient implied in our phase modulators is the $r_{51}/r_{42}$. The performances are tested achieving a $V_πL$ of 19.2 V$\cdot$cm. |
| title | Etching Properties of PIN-PMN-PT and its Integration in Electro-Optic Phase Modulators |
| topic | Optics |
| url | https://arxiv.org/abs/2409.04586 |