Tantalum thin films sputtered on silicon and on different seed layers: material characterization and coplanar waveguide resonator performance

Fuente: arXiv

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Bibliographic Details
Main Authors:	Singer, Moritz, Schoof, Benedikt, Gupta, Harsh, Zahn, Daniela, Weber, Johannes, Tornow, Marc
Format:	Preprint
Published:	2024
Subjects:	Materials Science Quantum Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2409.06041