Development of TiN/AlN-based superconducting qubit components
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arXiv
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| Auteurs principaux: | , , , , , , |
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| Format: | Preprint |
| Publié: |
2024
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| _version_ | 1866915422581817344 |
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| author | Schoof, Benedikt Singer, Moritz Lang, Simon Gupta, Harsh Zahn, Daniela Weber, Johannes Tornow, Marc |
| author_facet | Schoof, Benedikt Singer, Moritz Lang, Simon Gupta, Harsh Zahn, Daniela Weber, Johannes Tornow, Marc |
| contents | This paper presents the fabrication and characterization of superconducting qubit components from titanium nitride (TiN) and aluminum nitride (AlN) layers to create Josephson junctions and superconducting resonators in an all-nitride architecture. Our methodology comprises a complete process flow for the fabrication of TiN/AlN/TiN junctions, characterized by scanning electron microscopy (SEM), atomic force microscopy (AFM), ellipsometry and DC electrical measurements. We evaluated the sputtering rates of AlN under varied conditions, the critical temperatures of TiN thin films for different sputtering environments, and the internal quality factors of TiN resonators in the few-GHz regime, fabricated from these films. Overall, this offered insights into the material properties critical to qubit performance. Measurements of the dependence of the critical current of the TiN / AlN / TiN junctions yielded values ranging from 150 $μ$A to 2 $μ$A, for AlN barrier thicknesses up to ca. 5 nm, respectively. Our findings demonstrate advances in the fabrication of nitride-based superconducting qubit components, which may find applications in quantum computing technologies based on novel materials. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2409_07227 |
| institution | arXiv |
| publishDate | 2024 |
| record_format | arxiv |
| spellingShingle | Development of TiN/AlN-based superconducting qubit components Schoof, Benedikt Singer, Moritz Lang, Simon Gupta, Harsh Zahn, Daniela Weber, Johannes Tornow, Marc Applied Physics Materials Science Quantum Physics This paper presents the fabrication and characterization of superconducting qubit components from titanium nitride (TiN) and aluminum nitride (AlN) layers to create Josephson junctions and superconducting resonators in an all-nitride architecture. Our methodology comprises a complete process flow for the fabrication of TiN/AlN/TiN junctions, characterized by scanning electron microscopy (SEM), atomic force microscopy (AFM), ellipsometry and DC electrical measurements. We evaluated the sputtering rates of AlN under varied conditions, the critical temperatures of TiN thin films for different sputtering environments, and the internal quality factors of TiN resonators in the few-GHz regime, fabricated from these films. Overall, this offered insights into the material properties critical to qubit performance. Measurements of the dependence of the critical current of the TiN / AlN / TiN junctions yielded values ranging from 150 $μ$A to 2 $μ$A, for AlN barrier thicknesses up to ca. 5 nm, respectively. Our findings demonstrate advances in the fabrication of nitride-based superconducting qubit components, which may find applications in quantum computing technologies based on novel materials. |
| title | Development of TiN/AlN-based superconducting qubit components |
| topic | Applied Physics Materials Science Quantum Physics |
| url | https://arxiv.org/abs/2409.07227 |