Ab Initio Device-Driven Screening of Sub-1-nm Thickness Oxide Semiconductors for Future CMOS Technology Nodes
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arXiv
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| Main Authors: | Xu, Linqiang, Hu, Yue, Xu, Lianqiang, Xu, Lin, Li, Qiuhui, Wang, Aili, Lau, Chit Siong, Lu, Jing, Ang, Yee Sin |
|---|---|
| Format: | Preprint |
| Published: |
2024
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| Subjects: | |
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