Cryogenic microwave performance of silicon nitride and amorphous silicon deposited using low-temperature ICPCVD

Fuente: arXiv

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Bibliographic Details
Main Authors:	Sun, Jiamin, Shu, Shibo, Chai, Ye, Zhu, Lin, Zhang, Lingmei, Li, Yongping, Liu, Zhouhui, Li, Zhengwei, Xu, Yu, Yan, Daikang, Guo, Weijie, Wang, Yiwen, Liu, Congzhan
Format:	Preprint
Published:	2024
Subjects:	Instrumentation and Detectors Instrumentation and Methods for Astrophysics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2409.09301