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Main Authors: Gao1, Xiaoyue, Liu, Zhuohui, Han, Bo, Zhang, Xiaowen, Mao, Ruilin, Shi, Ruochen, Zhu, Ruixue, Lu, Jiangbo, Wang, Tao, Ge, Chen, Gao, Peng
Format: Preprint
Published: 2024
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Online Access:https://arxiv.org/abs/2409.12434
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author Gao1, Xiaoyue
Liu, Zhuohui
Han, Bo
Zhang, Xiaowen
Mao, Ruilin
Shi, Ruochen
Zhu, Ruixue
Lu, Jiangbo
Wang, Tao
Ge, Chen
Gao, Peng
author_facet Gao1, Xiaoyue
Liu, Zhuohui
Han, Bo
Zhang, Xiaowen
Mao, Ruilin
Shi, Ruochen
Zhu, Ruixue
Lu, Jiangbo
Wang, Tao
Ge, Chen
Gao, Peng
contents Hf0.5Zr0.5O2 (HZO) is a promising candidate for next generation ferroelectric memories and transistors. However, its ferroelectricity origin is still under debate due to the complex of its phase and microstructure in practical samples. In this study, we investigate the atomic structure of substrate-free HZO freestanding film with multislice electron ptychography, for which the ultra-high space resolution (up to ~25 pm) and capability to simultaneously image the cation and oxygen allow us to precisely determine the intrinsic atomic structures of different phases and reveal subtle changes among them. We clarify that the orthorhombic phase is ferroelectric with spontaneous polarization ~34{\pm}4 μC/cm2 (corresponding to 56{\pm}6 pm in displacement) that is accurately measured through statistical analysis. Significant polarization suppression is observed near the grain boundary, while no distinguishable structural changes are detected near the 180° ferroelectric domain walls. Through the direct oxygen imaging of orthorhombic phase from the [111] zone axis, we quantify a substantial number of oxygen vacancies with a preferential distribution, which influences the polarization direction and strength. These findings provide fundamentals for HZO research, and thus lay a foundation for the design of high-performance ferroelectric devices.
format Preprint
id arxiv_https___arxiv_org_abs_2409_12434
institution arXiv
publishDate 2024
record_format arxiv
spellingShingle Precise structure and polarization determination of Hf0.5Zr0.5O2 with electron ptychography
Gao1, Xiaoyue
Liu, Zhuohui
Han, Bo
Zhang, Xiaowen
Mao, Ruilin
Shi, Ruochen
Zhu, Ruixue
Lu, Jiangbo
Wang, Tao
Ge, Chen
Gao, Peng
Materials Science
Mesoscale and Nanoscale Physics
Hf0.5Zr0.5O2 (HZO) is a promising candidate for next generation ferroelectric memories and transistors. However, its ferroelectricity origin is still under debate due to the complex of its phase and microstructure in practical samples. In this study, we investigate the atomic structure of substrate-free HZO freestanding film with multislice electron ptychography, for which the ultra-high space resolution (up to ~25 pm) and capability to simultaneously image the cation and oxygen allow us to precisely determine the intrinsic atomic structures of different phases and reveal subtle changes among them. We clarify that the orthorhombic phase is ferroelectric with spontaneous polarization ~34{\pm}4 μC/cm2 (corresponding to 56{\pm}6 pm in displacement) that is accurately measured through statistical analysis. Significant polarization suppression is observed near the grain boundary, while no distinguishable structural changes are detected near the 180° ferroelectric domain walls. Through the direct oxygen imaging of orthorhombic phase from the [111] zone axis, we quantify a substantial number of oxygen vacancies with a preferential distribution, which influences the polarization direction and strength. These findings provide fundamentals for HZO research, and thus lay a foundation for the design of high-performance ferroelectric devices.
title Precise structure and polarization determination of Hf0.5Zr0.5O2 with electron ptychography
topic Materials Science
Mesoscale and Nanoscale Physics
url https://arxiv.org/abs/2409.12434