TCAD Simulation of Novel Multi-Spacer HK/MG 28nm Planar MOSFET for Sub-threshold Swing and DIBL Optimization

Fuente: arXiv

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Bibliographic Details
Main Authors:	Xiao, Zhentao, Zheng, Yihao, Zhang, Zonghao, Shi, Jinhong, Wang, Chenxing, Jiang, Yunteng, Huang, Haimeng, Islam, Aynul, Yang, Hongqiang
Format:	Preprint
Published:	2024
Subjects:	Applied Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2409.15015