TCAD Simulation of Novel Multi-Spacer HK/MG 28nm Planar MOSFET for Sub-threshold Swing and DIBL Optimization
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arXiv
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| Main Authors: | Xiao, Zhentao, Zheng, Yihao, Zhang, Zonghao, Shi, Jinhong, Wang, Chenxing, Jiang, Yunteng, Huang, Haimeng, Islam, Aynul, Yang, Hongqiang |
|---|---|
| Format: | Preprint |
| Published: |
2024
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| Subjects: | |
| Online Access: | |
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